• GDoeSII

  • Referenced in 1 article [sw25741]
  • diffractive optical elements and conversion to GDSII lithography files. We develop an open source software ... formats such as JPG and PNG to lithography graphic format GDSII for fabrication purposes ... GDSII format is also possible for grayscale lithography. We show as an example: The simulation ... working in diffractive optics from simulations to lithography...
  • Dr.LiTHO

  • Referenced in 1 article [sw28878]
  • describe the projection printing processes in semiconductor lithography. And Dr.LiTHO can also be used ... alternative exposure methods and for applications of lithography in other fields of micro- and nanofabrication...
  • VPDSL

  • Referenced in 1 article [sw16254]
  • complex manufacturing systems such as ASML’s lithography machines. These hardware configurations consist of actuator...
  • HoloGen

  • Referenced in 1 article [sw34839]
  • applied in fields including telecommunications, imaging, projection, lithography, beam shaping and optical tweezing, Computer Generated...
  • PARDISO

  • Referenced in 269 articles [sw00679]
  • The package PARDISO is a thread-safe, high...
  • ProGen

  • Referenced in 5 articles [sw02033]
  • ProGen: Provenance database generator for large-scale data...
  • SAMRAI

  • Referenced in 41 articles [sw04441]
  • Managing application complexity in the SAMRAI object-oriented...
  • JCMsuite

  • Referenced in 6 articles [sw06861]
  • JCMSUITE - SOLUTIONS FOR NANOOPTICS. JCMsuite is a complete...
  • CHIC

  • Referenced in 14 articles [sw09029]
  • Multi-material ALE computation in inertial confinement fusion...
  • JCMmode

  • Referenced in 3 articles [sw28747]
  • JCMmode: an adaptive finite element solver for the...