Based on coupled generalized finite/boundary elements and gradient type optimization methods this program package provides simulation and optimization of periodic diffractive structures with multilayer stacks.
References in zbMATH (referenced in 2 articles )
Showing results 1 to 2 of 2.
- Gross, H.; Rathsfeld, A.: Sensitivity analysis for indirect measurement in scatterometry and the reconstruction of periodic grating structures (2008)
- Elschner, Johannes; Hinder, Rainer; Schmidt, Gunther: Direct and inverse problems for diffractive structures -- optimization of binary gratings (2003)
Further publications can be found at: http://wias-berlin.de/publications/refereed/index.jsp?lang=1